ChemInform Abstract: Effect of Oxygen on the Etch Rate of NF3 Discharges.
- 期刊名称ChemInform
- 作者NORDHEDEN, K. J.; VERDEYEN, J. T.
- 卷第18卷
- 期第5期
- 印刷ISSN0931-7597
- 文件大小115.50KB
- 发表时间1987-02-03
- DOI10.1002/chin.198705326
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