SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Optical Microlithography VI - Contact Hole Imaging In Stepper Lithography
- 作者White, L. K.; Stover, Harry L.
- 卷第772卷
- 印刷ISSN0277-786X
- 文件大小2569.39KB
- 发表时间1987
- DOI10.1117/12.967056
- 页码239-247
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