SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices - Raman Microscopy Of Semiconductor Films
- 作者Fauchet, Philippe M.; Campbell, Ian H.; Glembocki, Orest J.; Pollak, Fred H.; Song, Jin-Joo
- 卷第794卷
- 印刷ISSN0277-786X
- 文件大小76.25KB
- 发表时间1987
- DOI10.1117/12.940908
- 页码167-169