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SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Advanced Processing of Semiconductor Devices - <title>Silicon Nitride For Gallium Arsenide Integrated Circuits</title>

SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Advanced Processing of Semiconductor Devices - Silicon Nitride For Gallium Arsenide Integrated Circuits

Nagle, J; Morgan, David V.; Mukherjee, Sayan D.

作者Nagle, J; Morgan, David V.; Mukherjee, Sayan D.
卷第797卷
印刷ISSN0277-786X
文件大小369.96KB
发表时间1987
DOI10.1117/12.941035
页码130-139

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