Properties of aluminum thin films prepared by facing targets sputtering system.
- 期刊名称Journal of the Metal Finishing Society of Japan
- 作者HIRATA, Toyoaki; NAOE, Masahiko
- 卷第38卷
- 期第9期
- 印刷ISSN0026-0614
- 电子ISSN1884-3395
- 文件大小1973.35KB
- 发表时间1987
- DOI10.4139/sfj1950.38.450
- 页码450-452
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