Spiral hollow cathode plasma‐assisted diamond deposition
- 作者Tzeng, Y.; Kung, P. J.; Zee, R.; Legg, K.; Solnick‐Legg, H.; Burns, D.; Loo, B. H.
- 卷第53卷
- 期第23期
- 电子ISSN0003-6951
- 文件大小485.64KB
- 发表时间1988
- DOI10.1063/1.100268
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