Magnetron sputtering
- 期刊名称Physics in Technology
- 作者Swann, S
- 卷第19卷
- 期第2期
- 印刷ISSN0305-4624
- 文件大小878.66KB
- 发表时间1988-03
- DOI10.1088/0305-4624/19/2/304
- 页码67-75
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