Activation of reactive sputtering by a plasma beam from an unbalanced magnetron
- 作者AG Spencer; K Oka; RP Howson; RW Lewin
- 卷第38卷
- 印刷ISSN0042-207X
- 文件大小709.79KB
- 发表时间1988
- DOI10.1016/0042-207x(88)90479-4
- 页码857-859
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