Advance in resist technology and processing III. Proceedings of SPIE – The Internatinal Society for Optical Engineering Vol. 631. C. GRANT WILLSON, Chairman/Editor. Bellingham, WA: SPIE – The International Society for Optical Engineering 1986. VI, 346 pages, $ 61.00
- 作者G. Reinisch
- 卷第39卷
- 期第3期
- 印刷ISSN0323-7648
- 电子ISSN1521-4044
- 文件大小165.36KB
- 发表时间1988
- DOI10.1002/actp.1988.010390330
- 页码153-153