Megaelectronvolt phosphorus implantation for bipolar devices
- 期刊名称IEEE Transactions on Electron Devices
- 作者Bohm, H.-J.; Bernewitz, L.; Bohm, W.R.; Kopl, R.
- 卷第35卷
- 期第10期
- 印刷ISSN0018-9383
- 文件大小453.74KB
- 发表时间1988
- DOI10.1109/16.7362
- 页码1616-1619
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