Angular Etching Correlations from RIE
- 期刊名称Journal of The Electrochemical Society
- 作者Hamblen, David P.
- 卷第135卷
- 期第7期
- 印刷ISSN0013-4651
- 文件大小1157.15KB
- 发表时间1988
- DOI10.1149/1.2096138
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