Influence of process parameters on the composition and the electrical properties of thin-plasma-nitrided oxides
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Fazan, P. C.
- 卷第6卷
- 期第4期
- 印刷ISSN0734-211X
- 文件大小967.22KB
- 发表时间1988-7
- DOI10.1116/1.584303
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