Accurate measurement of the operating frequency in ICs with the SEM
- 期刊名称Journal of Physics E: Scientific Instruments
- 作者Nakamae, K; Fujioka, H; Ura, K
- 卷第21卷
- 期第9期
- 印刷ISSN0022-3735
- 文件大小285.35KB
- 发表时间1988-09
- DOI10.1088/0022-3735/21/9/023
- 页码913-915
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