Growth of Thin Epitaxial CoSi2 Layers on Si(100)
- 期刊名称MRS Proceedings
- 作者Yalisove, S. M.; Tung, R. T.; Batstone, J. L.
- 卷第116卷
- 电子ISSN1946-4274
- 文件大小1942.82KB
- 发表时间1988-1
- DOI10.1557/proc-116-439
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