Characteristics of rare‐earth element erbium implanted in silicon
- 作者Tang, Y. S.; Heasman, K. C.; Gillin, W. P.; Sealy, B. J.
- 卷第55卷
- 期第5期
- 文件大小511.27KB
- 发表时间1989
- DOI10.1063/1.101888
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