Infrared absorption and reflection spectroscopic studies of SOI structures formed by oxygen or nitrogen implantation
- 作者Yu Yuehui; Fang Ziwei; Lin Chenglu; Zou Shichang; P.L.F. Hemment
- 卷第8卷
- 文件大小493.54KB
- 发表时间1989
- DOI10.1016/0167-577x(89)90135-3
- 页码95-100
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