Monitoring of radio-frequency glow-discharge plasma
Mutsukura, Nobuki; Kobayashi, Kenji; Machi, Yoshio
- 期刊名称Journal of Applied Physics
- 作者Mutsukura, Nobuki; Kobayashi, Kenji; Machi, Yoshio
- 卷第66卷
- 期第10期
- 印刷ISSN0021-8979
- 文件大小1062.05KB
- 发表时间1989
- DOI10.1063/1.343826