Sputtering of metal layers deposited on graphite at elevated temperatures
- 作者Y. Hasebe; K. Kondoh; K. Morita
- 印刷ISSN0022-3115
- 文件大小525.29KB
- 发表时间1989
- DOI10.1016/0022-3115(89)90391-7
- 页码945-950
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