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Dissociative chemisorption of NF3 at Si(100) surfacesJ.A. Shorter; J.G. Langan; J.I. Steinfeld · 1989
Reactions of laser-generated CF2 on silicon and silicon oxide surfacesJ.G. Langan; J.A. Shorter; Xu Xin; S.A. Joyce; J.I. Steinfeld · 1989