Simultaneous quantitative determination of the distribution of dopants in silicon by high mass resolution secondary ion mass spectrometry

Stingeder, Gerhard.; Piplits, Kurt.; Gara, Stefan.; Grasserbauer, Manfred.; Budil, Matthias.; Poetzl, Hans.

期刊名称Analytical Chemistry
作者Stingeder, Gerhard.; Piplits, Kurt.; Gara, Stefan.; Grasserbauer, Manfred.; Budil, Matthias.; Poetzl, Hans.
卷第61卷
期第5期
印刷ISSN0003-2700
电子ISSN1520-6882
文件大小578.89KB
发表时间1989-03
DOI10.1021/ac00180a007
页码412-416

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