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[IEEE 7th Pulsed Power Conference - Monterey, CA (June 11-14, 1989)] 7th Pulsed Power Conference - High efficiency operation of the high repetition rate magnetic pulse compressor for krf excimer lasers

[IEEE 7th Pulsed Power Conference - Monterey, CA (June 11-14, 1989)] 7th Pulsed Power Conference - High efficiency operation of the high repetition rate magnetic pulse compressor for krf excimer lasers

Hatanaka, H.; Obara, M.

作者Hatanaka, H.; Obara, M.
文件大小386.72KB
发表时间1989
DOI10.1109/ppc.1989.767574
页码671-674

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