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Electrical characterization of epitaxial silicon films formed by a low kinetic energy particle process

Electrical characterization of epitaxial silicon films formed by a low kinetic energy particle process

Ohmi, Tadahiro; Iwabuchi, Hiroshi; Shibata, Tadashi; Ichikawa, Takeshi
  • 期刊名称Applied Physics Letters
  • 作者Ohmi, Tadahiro; Iwabuchi, Hiroshi; Shibata, Tadashi; Ichikawa, Takeshi
  • 卷第54卷
  • 期第3期
  • 印刷ISSN0003-6951
  • 文件大小549.63KB
  • 发表时间1989
  • DOI10.1063/1.100981
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