Capacitive probes for rf process plasmas
- 期刊名称Review of Scientific Instruments
- 作者Savas, S. E.; Donohoe, K. G.
- 卷第60卷
- 期第11期
- 印刷ISSN0034-6748
- 文件大小807.65KB
- 发表时间1989
- DOI10.1063/1.1140535
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