Lateral resolution of Si induced disordering of superlattices
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Dobisz, E. A.
- 卷第7卷
- 期第6期
- 印刷ISSN0734-211X
- 文件大小732.33KB
- 发表时间1989-11
- DOI10.1116/1.584647
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