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[IEEE International Symposium on VLSI Technology, Systems and Applications - Taipei, Taiwan (17-19 May 1989)] International Symposium on VLSI Technology, Systems and Applications - High temperature alloy and contact annealing with RTA on AlSi/TiW metallization

[IEEE International Symposium on VLSI Technology, Systems and Applications - Taipei, Taiwan (17-19 May 1989)] International Symposium on VLSI Technology, Systems and Applications - High temperature alloy and contact annealing with RTA on AlSi/TiW metallization

Chou, H.M.; Su, W.-D.; Liou, J.C.; Tuan, H.C.
  • 作者Chou, H.M.; Su, W.-D.; Liou, J.C.; Tuan, H.C.
  • 文件大小235.25KB
  • 发表时间1989
  • DOI10.1109/vtsa.1989.68584
  • 页码68-70
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