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A real-time electron beam testing system (IC testing application)

A real-time electron beam testing system (IC testing application)

Fujioka, H; Nakamae, K; Hirota, M; Ura, K; Takashima, S

期刊名称Journal of Physics E: Scientific Instruments
作者Fujioka, H; Nakamae, K; Hirota, M; Ura, K; Takashima, S
卷第22卷
期第3期
印刷ISSN0022-3735
文件大小591.29KB
发表时间1989-03
DOI10.1088/0022-3735/22/3/001
页码138-143

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