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The effect of substrate materials on the microstructure and phases of silicon carbide prepared by chemical vapour deposition (CVD)

The effect of substrate materials on the microstructure and phases of silicon carbide prepared by chemical vapour deposition (CVD)

Young-Su Park; Myong-Hyon Kim; Jai-Young Lee
  • 作者Young-Su Park; Myong-Hyon Kim; Jai-Young Lee
  • 卷第8卷
  • 期第3期
  • 印刷ISSN0261-8028
  • 电子ISSN1573-4811
  • 文件大小479.52KB
  • 发表时间1989-03
  • DOI10.1007/bf00725512
  • 页码321-325
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