Characterization of CVD-hydrogenated diamondlike thin films on silicon by EELS, RBS/channeling and nuclear reaction analysis

• 作者J. Bruley; P. Madakson; J.C. Liu
• 卷第45卷
• 印刷ISSN0168-583X
• 文件大小522.79KB
• 发表时间1990
• DOI10.1016/0168-583x(90)90912-e
• 页码618-621