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Electron-beam-induced decomposition and oxidation of thin CaF2-layers on Si(111) Studied by auger electron spectroscopy

Electron-beam-induced decomposition and oxidation of thin CaF2-layers on Si(111) Studied by auger electron spectroscopy

Stefan Baunack; Alfred Zehe
  • 作者Stefan Baunack; Alfred Zehe
  • 卷第225卷
  • 期第3期
  • 文件大小735.85KB
  • 发表时间1990
  • DOI10.1016/0039-6028(90)90450-m
  • 页码292-300
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