Electron-beam-induced decomposition and oxidation of thin CaF2-layers on Si(111) Studied by auger electron spectroscopy
Stefan Baunack; Alfred Zehe
- 作者Stefan Baunack; Alfred Zehe
- 卷第225卷
- 期第3期
- 文件大小735.85KB
- 发表时间1990
- DOI10.1016/0039-6028(90)90450-m
- 页码292-300