[IEEE International Technical Digest on Electron Devices - San Francisco, CA, USA (9-12 Dec. 1990)] International Technical Digest on Electron Devices - Rugged surface poly-Si electrode and low temperature deposited Si/sub 3/N/sub 4/ for 64 Mbit and beyond STC DRAM cell
Yoshimaru, M.; Miyano, J.; Inoue, N.; Sakamoto, A.; You, S.; Tamura, H.; Ino, M.
- 作者Yoshimaru, M.; Miyano, J.; Inoue, N.; Sakamoto, A.; You, S.; Tamura, H.; Ino, M.
- 文件大小509.16KB
- 发表时间1990
- DOI10.1109/iedm.1990.237113
- 页码659-662