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Influence of surface topography on depth profiles obtained with secondary-ion mass spectrometry

Influence of surface topography on depth profiles obtained with secondary-ion mass spectrometry

Walker, A. J.; Borchert, M. T.; Vriezema, C. J.; Zalm, P. C.

期刊名称Applied Physics Letters
作者Walker, A. J.; Borchert, M. T.; Vriezema, C. J.; Zalm, P. C.
卷第57卷
期第22期
印刷ISSN0003-6951
文件大小674.69KB
发表时间1990
DOI10.1063/1.103874

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