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[IEEE IEEE Symposium on Ultrasonics - Honolulu, HI, USA (4-7 Dec. 1990)] IEEE Symposium on Ultrasonics - The elastic properties of thin-film silicon nitride

[IEEE IEEE Symposium on Ultrasonics - Honolulu, HI, USA (4-7 Dec. 1990)] IEEE Symposium on Ultrasonics - The elastic properties of thin-film silicon nitride

Hickernell, T.S.; Fliegel, F.M.; Hickernell, F.S.

作者Hickernell, T.S.; Fliegel, F.M.; Hickernell, F.S.
文件大小372.42KB
发表时间1990
DOI10.1109/ultsym.1990.171405
页码445-448

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