A model for the power dissipation in rf plasmas
- 期刊名称Journal of Applied Physics
- 作者van Roosmalen, A. J.; van Voorst Vader, P. J. Q.
- 卷第68卷
- 期第4期
- 印刷ISSN0021-8979
- 文件大小1245.25KB
- 发表时间1990
- DOI10.1063/1.347155
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