![Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy]()
Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopyChang, J. P.; Green, M. L.; Donnelly, V. M.; Opila, R. L.; Eng, J.; Sapjeta, J.; Silverman, P. J.; Weir, B.; Lu, H. C.; Gustafsson, T.; Garfunkel, E. · Journal of Applied Physics · 2000