SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Surface and Interface Analysis of Microelectronic Materials Processing and Growth - Investigation of Copper / Polyimide Interfacial Reactions
- 作者Nagaraj an, Rao M.; Wells, Victor A.; Brillson, Leonard J.; Pollak, Fred H.
- 卷第1186卷
- 印刷ISSN0277-786X
- 文件大小288.33KB
- 发表时间1990
- DOI10.1117/12.963929
- 页码169-178
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