SPIE Proceedings [SPIE Interferometry '89 - Warsaw, Poland (Monday 8 May 1989)] Interferometry '89 - Interferometry In Microlithography
- 作者Shapiro, A. G.; Makiyenkov, P. F.; Jaroszewicz, Zbigniew; Pluta, Maksymilian; Jaroszewicz, Zbigniew; Pluta, Maksymilian
- 卷第1121卷
- 印刷ISSN0277-786X
- 文件大小364.76KB
- 发表时间1990
- DOI10.1117/12.961336
- 页码630-632
同作者推荐
SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - <title>GaAs CCD readout for engineered bandgap detectors</title>Song, John; Rossi, David V.; Fossum, Eric R.; Rogers, Steven K.; Dereniak, Eustace L.; McGeehin, P.; Carlin, Donald B.; Kay, David B.; Sampson, Robert E. · 2012
SPIE Proceedings [SPIE 1989 Orlando Symposium - Orlando, FL (Monday 27 March 1989)] Infrared Detectors, Focal Plane Arrays, and Imaging Sensors - <title>IRET - A CCD Focal Plane Image Processor Chip</title>Eid, E-S.; Fossum, Eric R.; Dereniak, Eustace L.; Sampson, Robert E. · 1989