Semiconductor or vibration sensors using multiple cantilever beams with different lengths
- 作者Hideo Muro; Member; Shigeo Hoshino; Member
- 卷第74卷
- 期第8期
- 印刷ISSN8756-663X
- 电子ISSN1520-6432
- 文件大小546.67KB
- 发表时间1991
- DOI10.1002/ecjb.4420740813
- 页码109-116
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