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Composition and structure of titanium nitride films prepared by ion beam enhanced deposition

Composition and structure of titanium nitride films prepared by ion beam enhanced deposition

Xi Wang; Xianghuai Liu; Youshan Chen; Genqing Yang; Zuyao Zhou; Zhihong Zheng; Wei Huang; Shichang Zou
  • 作者Xi Wang; Xianghuai Liu; Youshan Chen; Genqing Yang; Zuyao Zhou; Zhihong Zheng; Wei Huang; Shichang Zou
  • 印刷ISSN0168-583X
  • 文件大小362.86KB
  • 发表时间1991
  • DOI10.1016/0168-583x(91)95221-x
  • 页码272-275
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