Evaluation of thin films fabricated by low energy direct ion beam deposition for soft X-rays
Ito Kazuhiko; Yonemitsu Toshihiro; Etoh Kazuyuki; Sekiguchi Hisao; Yamada Ichiro; Kataoka Izumi; Hervé-André Durand
- 作者Ito Kazuhiko; Yonemitsu Toshihiro; Etoh Kazuyuki; Sekiguchi Hisao; Yamada Ichiro; Kataoka Izumi; Hervé-André Durand
- 印刷ISSN0168-583X
- 文件大小445.15KB
- 发表时间1991
- DOI10.1016/0168-583x(91)95232-3
- 页码321-325