The Nissin PR-80A high current ion implantation system
- 作者T. Kawai; M. Chohtokudani; M. Naito; T. Hiramatsu; M. Sasaki; T. Sunouchi; Y. Nishigami; T. Matsumoto; M. Nakaya; M. Nakazawa
- 卷第55卷
- 印刷ISSN0168-583X
- 文件大小544.84KB
- 发表时间1991
- DOI10.1016/0168-583x(91)96209-4
- 页码443-447
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