Solubility and Diffusion Coefficient of Electrically Active Titanium in Silicon
- 期刊名称Japanese Journal of Applied Physics
- 作者Kuge, Shigehiro; Nakashima, Hiroshi
- 卷第30卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小655.89KB
- 发表时间1991-11-15
- DOI10.1143/jjap.30.2659
- 页码2659-2663
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