Crystal orientation in titanium thin films deposited by the sputtering method without plasma damage
Masahiko Naoe; Satoshi Ono; Toyoaki Hirata
- 作者Masahiko Naoe; Satoshi Ono; Toyoaki Hirata
- 卷第134卷
- 文件大小473.08KB
- 发表时间1991
- DOI10.1016/0921-5093(91)90976-t
- 页码1292-1295