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Background pressure dependence of GaAs and AlGaAs growth rates in gas-source molecular beam epitaxy

Background pressure dependence of GaAs and AlGaAs growth rates in gas-source molecular beam epitaxy

Junji Saito; Takeshi Maeda; Katsuji Ono; Kazuo Kondo
  • 作者Junji Saito; Takeshi Maeda; Katsuji Ono; Kazuo Kondo
  • 卷第111卷
  • 印刷ISSN0022-0248
  • 文件大小510.29KB
  • 发表时间1991
  • DOI10.1016/0022-0248(91)91036-a
  • 页码544-549
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