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The Effect of Hydrogen Dilution of the Gas Plasma on Glow Discharge a-Ge:HTurner, W. A.; Jones, S. J.; Lee, Choochon; Lee, S. M.; Li, Yuan-min; Paul, W. · MRS Proceedings · 1989
New Interpretation of the Effect of Hydrogen Dilution of Silane on Glow-Discharged Hydrogenated Amorphous Silicon for Stable Solar CellsOkamoto, Shingo; Hishikawa, Yoshihiro; Tsuda, Shinya · Japanese Journal of Applied Physics · 1996
The influence of deposition parameters on the growth of a-SiGe:H alloys in a plasma CVD systemM. Zeman; I. Ferreira; M.J. Geerts; J.W. Metselaar · 1990