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Ultrasensitive chemically amplified resist systems

H. Sachdev; W. Brunsvold; R. Kwong; W. Montgomery; W. Moreau; K. Welsh; R. Kvitek; W. Conley

作者H. Sachdev; W. Brunsvold; R. Kwong; W. Montgomery; W. Moreau; K. Welsh; R. Kvitek; W. Conley
卷第13卷
印刷ISSN0167-9317
文件大小312.82KB
发表时间1991
DOI10.1016/0167-9317(91)90039-g
页码19-22