[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Polysilicon microstructures
Farooqui, M.M.; Evans, A.G.R.
- 作者Farooqui, M.M.; Evans, A.G.R.
- 文件大小381.89KB
- 发表时间1991
- DOI10.1109/memsys.1991.114793
- 页码187-191