[IEEE Ninth Biennial University/Government/Industry Microelectronics Symposium - Melbourne, FL, USA (12-14 June 1991)] Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium - A joint industry-university CIM project for university microelectronics manufacturing
- 作者Fuller, L.F.; Karacal, C.; VanDenbosch, T.J.; Slagsvol, S.; Poponiak, M.
- 文件大小377.84KB
- 发表时间1991
- DOI10.1109/ugim.1991.148117
- 页码37-40
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