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[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Optical excitation of micro-mechanical resonators

[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Optical excitation of micro-mechanical resonators

Lammerink, T.S.J.; Elwenspoek, M.; Fluitman, J.H.J.

作者Lammerink, T.S.J.; Elwenspoek, M.; Fluitman, J.H.J.
文件大小353.61KB
发表时间1991
DOI10.1109/memsys.1991.114788
页码160-165

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