[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - A micropipe fabrication process
- 作者Kuo, C.-L.; Masuzawa, T.; Fujino, M.
- 文件大小274.62KB
- 发表时间1991
- DOI10.1109/memsys.1991.114773
- 页码80-85
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