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Structure and mechanical properties of hydrogenated carbon films prepared by magnetron sputtering (for magnetic discs)

Structure and mechanical properties of hydrogenated carbon films prepared by magnetron sputtering (for magnetic discs)

Marchon, B.; Vo, P.N.; Khan, M.R.; Ager, J.W.

期刊名称IEEE Transactions on Magnetics
作者Marchon, B.; Vo, P.N.; Khan, M.R.; Ager, J.W.
卷第27卷
期第6期
印刷ISSN0018-9464
文件大小287.64KB
发表时间1991
DOI10.1109/20.278773
页码5160-5162

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